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Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown

Greenan, J, Mahony, CMO, Mariotti, D and Maguire, PD (2011) Characterization of hollow cathode and parallel plate microplasmas: scaling and breakdown. Plasma Sources Science and Technology, 20 (2). 025011. [Journal article]

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URL: http://stacks.iop.org/0963-0252/20/i=2/a=025011


We present an experimental comparison of parallel plate and hollow cathode microplasma structures, operated at high pressure with narrow anode�cathode gaps. A moveable anode arrangement with ±12 µm spatial resolution was used to vary the electrode separation to cover the pd range between 0.01 and 4 Torr cm for both structures. The hollow cathode discharge was operated with pressure�diameter ( pD ) product values between 1.8 and 7.2 Torr cm and an aspect ratio of ~5. Analysis of V � I characteristics shows j / p 2 and j 2 p scaling for low and high current modes, respectively. Electron temperature estimates between 2 and 3 eV were obtained by solving a numerical collisional�radiative model based on transitions from 4p argon levels. The hollow cathode sheath thickness for both ionizing and non-ionizing sheath conditions was determined analytically and the diffusion equation was solved numerically to estimate the plasma density profile for the ionizing sheath case.

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:17628
Deposited By: Professor Davide Mariotti
Deposited On:29 Mar 2011 10:49
Last Modified:17 Oct 2017 15:57

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