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Perspectives on atmospheric-pressure plasmas for nanofabrication

Mariotti, D and Sankaran, RM (2011) Perspectives on atmospheric-pressure plasmas for nanofabrication. Journal of Physics D: Applied Physics, 44 (17). p. 174023. [Journal article]


URL: http://stacks.iop.org/0022-3727/44/i=17/a=174023


Low-pressure, low-temperature plasmas are widely used for materials applications in industries ranging from electronics to medicine. To avoid the high costs associated with vacuum equipment, there has always been a strong motivation to operate plasmas at higher pressures, up to atmospheric. However, high-pressure operation of plasmas often leads to instabilities and gas heating, conditions that are unsuitable for materials applications. The recent development of microscale plasmas (i.e. microplasmas) has helped realize the sustainment of stable, non-thermal plasmas at atmospheric pressure and enable low-cost materials applications. There has also been an unexpected benefit of atmospheric-pressure operation: the potential to fabricate nanoscale materials which is not possible by more conventional, low-pressure plasmas. For example, in a high-pressure environment, nanoparticles can be nucleated in the gas phase from vapour (or solid metal) precursors. Alternatively, non-thermal, atmospheric-pressure plasmas can be coupled with liquids such as water or ethanol to nucleate and modify solution-phase nanoparticles. In this perspective paper, we review some of these recent efforts and provide an outlook for the rapidly emerging field of atmospheric-pressure plasmas for nanofabrication.

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:18133
Deposited By: Professor Davide Mariotti
Deposited On:19 Apr 2011 07:58
Last Modified:17 Oct 2017 15:57

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