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Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis

Lemoine, P and McLaughlin, JAD (1997) Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. In: ELECTRON MICROSCOPY AND ANALYSIS 1997. IOP PUBLISHING LTD. (153) 4 pp. [Conference contribution]

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Abstract

The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.

Item Type:Conference contribution (Paper)
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:18928
Deposited By: Mrs Ann Blair
Deposited On:19 Jul 2011 08:02
Last Modified:19 Jul 2011 08:02

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