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Quantitative evaluation of local charge trapping in dielectric stacked gate structures using Kelvin probe force microscopy

Lubarsky, G, Shikler, R, Ashkenasy, N and Rosenwaks, Y (2002) Quantitative evaluation of local charge trapping in dielectric stacked gate structures using Kelvin probe force microscopy. Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures, 20 (5). p. 1914. [Journal article]

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URL: http://dx.doi.org/10.1116/1.1502701

DOI: doi:10.1116/1.1502701


Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
ID Code:19775
Deposited By: Dr Gennady Lubarsky
Deposited On:06 Sep 2011 14:51
Last Modified:06 Sep 2011 14:51

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