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Plasma-driven self-organization of Ni nanodot arrays on Si(100)

Levchenko, I., Ostrikov, K., Diwan, K., Winkler, K. and Mariotti, D (2008) Plasma-driven self-organization of Ni nanodot arrays on Si(100). APPLIED PHYSICS LETTERS, 93 (18). pp. 183102-1. [Journal article]

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URL: http://scitation.aip.org/getpdf/servlet/GetPDFServlet?filetype=pdf&id=APPLAB000093000018183102000001&idtype=cvips&prog=normal

DOI: 10.1063/1.3012572


The results of the combined experimental and numerical study suggest that onequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of variousmaterials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:256
Deposited By: Professor Davide Mariotti
Deposited On:14 Sep 2009 10:39
Last Modified:18 Aug 2011 10:51

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