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Plasma-controlled metal catalyst saturation and the initial stage of carbon nanostructure array growth

Levchenko, I., Ostrikov, K., Mariotti, D and Murphy, AB (2008) Plasma-controlled metal catalyst saturation and the initial stage of carbon nanostructure array growth. JOURNAL OF APPLIED PHYSICS, 104 (7). 073308-1. [Journal article]

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URL: http://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000104000007073308000001&idtype=cvips&gifs=yes

DOI: 10.1063/1.2996272


The kinetics of the nucleation and growth of carbon nanotube and nanocone arrays on Ni catalyst nanoparticles on a silicon surface exposed to a low-temperature plasma are investigated numerically, using a complex model that includes surface diffusion and ion motion equations. It is found that the degree of ionization of the carbon flux strongly affects the kinetics of nanotube and nanocone nucleation on partially saturated catalyst patterns. The use of highly ionized carbon flux allows formation of a nanotube array with a very narrow height distribution of half-width 7 nm. Similar results are obtained for carbon nanocone arrays, with an even narrower height distribution, using a highly ionized carbon flux. As the deposition time increases, nanostructure arrays develop without widening the height distribution when the flux ionization degree is high, in contrast to the fairly broad nanostructure height distributions obtained when the degree of ionization is low. (C) 2008 American Institute of Physics. [DOI: 10.1063/1.2996272]

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:257
Deposited By: Professor Davide Mariotti
Deposited On:14 Sep 2009 10:46
Last Modified:18 Aug 2011 10:51

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