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The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films

McCann, R, Roy, SS, Papakonstantinou, P, Abbas, GA and McLaughlin, JAD (2005) The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films. DIAMOND AND RELATED MATERIALS, 14 (3-7, Sp. Iss. SI). pp. 983-988. [Journal article]

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URL: http://www.sciencedirect.com/science?_ob=MImg&_imagekey=B6TWV-4FPX2KX-1-2&_cdi=5572&_user=126978&_orig=search&_coverDate=07%2F31%2F2005&_sk=999859996&view=c&wchp=dGLbVzb-zSkWA&md5=62f3f3d7fc3f9e5007f3311e57eef361&ie=/sdarticle.pdf

DOI: 10.1016/j.diamond.2004.12.037

Abstract

Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.

Item Type:Journal article
Keywords:tetrahedral carbon; thickness; XRR; vibrational spectroscopies
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:285
Deposited By: Mrs Ann Blair
Deposited On:19 Oct 2009 12:15
Last Modified:07 Apr 2014 13:51

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