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Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios

Baranov, O, Zhong, X, Fang, J, Kumar, S, Xu, S, Cvelbar, U, Mariotti, D and Ostrikov, K (2014) Dense Plasmas in Magnetic Traps: Generation of Focused Ion Beams With Controlled Ion-to-Neutral Flux Ratios. IEEE TRANSACTIONS ON PLASMA SCIENCE, 42 . pp. 2518-2519. [Journal article]

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Abstract

Customized magnetic traps were developed to produce a domain of dense plasmas with a narrow ion beam directed to a particular area of the processed substrate. A planar magnetron coupled with an arc discharge source created the magnetic traps to confine the plasma electrons and generate the ion beam with the controlled ratio of ion-to-neutral fluxes. Images of the plasma jet patterns and numerical vizualizations help explaining the observed phenomena.

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:30480
Deposited By: Professor Davide Mariotti
Deposited On:18 Nov 2014 10:42
Last Modified:17 Oct 2017 16:16

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