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Nanostructured Ti thin films by magnetron sputtering at oblique angles

Alvarez, R, Garcia-Martin, J M, Garcia-Valenzuela, A, Macias-Montero, Manuel, Ferrer, F J, Santiso, J, Rico, V, Cotrino, J, Gonzalez-Elipe, A R and Palmero, A (2015) Nanostructured Ti thin films by magnetron sputtering at oblique angles. Journal of Physics D: Applied Physics, 49 (4). 045303. [Journal article]

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URL: http://dx.doi.org/10.1088/0022-3727/49/4/045303

DOI: doi:10.1088/0022-3727/49/4/045303


Item Type:Journal article
Keywords:Nanostructures, thin films, magnetron sputtering, oblique angles
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:33755
Deposited By: Mr Manuel Macias-Montero
Deposited On:24 Mar 2016 14:23
Last Modified:24 Mar 2016 14:23

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