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A facile method for the deposition of thermally stable diamond like carbon thin films via carbon dioxide precursor gas

Ray, Sekhar C., Bhattacharya, Gourav, Miller, Mark A., Sarma, Sweety, Upadhay, Ravi Kant, McLaughlin, JAD and Roy, Susanta Sinha (2016) A facile method for the deposition of thermally stable diamond like carbon thin films via carbon dioxide precursor gas. Diamond and Related Materials, . . [Journal article]

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URL: http://dx.doi.org/10.1016/j.diamond.2016.07.013

DOI: doi:10.1016/j.diamond.2016.07.013

Abstract

The thermal stability and tribological performance of silicon- and oxygen-incorporated diamond-like carbon (DLC) and silicon doped-DLC films were investigated. The DLC and DLC:Si are deposited on various (silicon, stainless steel and aluminium) substrates within the thickness range 200–400 nm by radio frequency plasma-enhanced chemical vapour deposition (PECVD) method. Carbon dioxide (CO2) precursor gas is used to reduce the hydrogen content and to increase the adhesion of the films to the substrate. The X-ray photoelectron spectroscopy, Raman spectroscopy, surface profilometry and nano-indentation are used to study the chemical composition, microstructure, thermal stability and mechanical properties of the films. For CO2 precursor made DLC samples, Raman parameters did not show any significant change up to temperature 500 °C. The lowest coefficient of friction was found to be 0.298 for the DLC:Si film prepared with CO2 at room temperature and corresponded lowest wear rate of 1.77 × 10− 10 mm3/Nm. The micro-structural properties at various annealing temperature were critically analysed by monitoring graphitization behaviour and oxidation of the film surface

Item Type:Journal article
Keywords:thermally stable diamond like carbon thin films
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:36805
Deposited By: Professor James McLaughlin
Deposited On:15 Feb 2017 13:42
Last Modified:17 Oct 2017 16:27

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