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Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study

Ray, SC, Pong, WF and Papakonstantinou, P (2016) Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study. Thin Solid Films, 610 . pp. 42-47. [Journal article]

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URL: http://www.sciencedirect.com/science/article/pii/S0040609016301390

DOI: 10.1016/j.tsf.2016.04.048

Abstract

The X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES) and Raman spectroscopy results show that the incorporation of nitrogen in pulsed laser deposited diamond like carbon (DLC) thin films, reverts the sp3 network to sp2 as evidenced by an increase of the sp2 cluster and ID/IG ratio in C K-edge XANES and Raman spectra respectively which reduces the hardness/ Young's modulus into the film network. Si-doped DLC film deposited in a plasma enhanced chemical vapour deposition process reduces the sp2 cluster and ID/IG ratio that causes the decrease of hardness/Young's modulus of the film structure. The Fe-doped DLC films deposited by dip coating technique increase the hardness/Young's modulus with an increase of sp3-content in DLC film structure.

Item Type:Journal article
Keywords:Diamond like carbon (DLC), Fe-doped DLC, N-doped DLC, amorphous carbon Si-doped DLC, X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES), Raman spectroscopy
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:36973
Deposited By: Professor Pagona Papakonstantinou
Deposited On:13 Mar 2017 13:45
Last Modified:17 Oct 2017 16:27

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