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The Influence of argon gas pressure on co-sputtered calcium phosphate thin films

Boyd, A, Duffy, H, McCann, R, Cairns, ML and Meenan, BJ (2007) The Influence of argon gas pressure on co-sputtered calcium phosphate thin films. NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS, 258 (2). pp. 421-428. [Journal article]

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DOI: 10.1016/j.nimb.2007.02.072


A series of Ca-P coatings have been co-deposited by RF magnetron sputtering from hydroxyapatite targets at a range of different argon gas pressures (1-5 Pa) at a low discharge power level. The resultant surfaces were analysed both as-deposited and after annealing at 500 degrees C using fourier transform infrared spectroscopy (FTIR), X-Ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS) and stylus profilometry. The deposition rate increased with increasing argon gas pressure up to 2 Pa, but decreased significantly as the pressure increased up to 5 Pa. The Ca/P ratios of the as-deposited coatings were lower than expected, and decreased significantly at the higher argon gas pressures. The corresponding FTIR and XRD data showed that the as-deposited surfaces were poorly hydroxylated and were mostly amorphous in nature. By comparison, the annealed surfaces had Ca/P ratios of between 3.38 +/- 0.11 (1 Pa) and 1.82 +/- 0.06 (5 Pa). The FTIR and XRD data for the annealed samples were indicative of HA, however, as the gas pressure increased above 3 Pa, these surfaces were most likely transformed into dehydroxylated HA. This study has shown the utility of varying the argon gas pressure whilst co-sputtering HA in order to modify the resultant surface conditions. (c) 2007 Elsevier B.V. All rights reserved.

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:5778
Deposited By: Dr Adrian Boyd
Deposited On:04 Jan 2010 09:46
Last Modified:07 Apr 2014 13:19

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