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Single-crystal micromachining using multiple fusion-bonded layers

Brown, A, O'Neill, G and Blackstone, S (2003) Single-crystal micromachining using multiple fusion-bonded layers. In: Micromachining and Microfabrication Process Technology VI, Santa Clara. UNSPECIFIED. 10 pp. [Conference contribution]

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URL: http://dx.doi.org/10.1117/12.396460

DOI: doi:10.1117/12.396460


Multi-layer structures have been fabricated using Fusion bonding. The paper shows void free layers of between 2 and 100 microns that have been bonded to form multi-layer structures. Silicon layers have been bonded both with and without interfacial oxide layers

Item Type:Conference contribution (Paper)
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:6693
Deposited By: Dr Alan Brown
Deposited On:20 Jan 2010 09:15
Last Modified:09 Dec 2015 10:05

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