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Electrical characterization of radio frequency discharges

Mahony, CMO, Maguire, PD and Graham, WG (2005) Electrical characterization of radio frequency discharges. PLASMA SOURCES SCIENCE AND TECHNOLOGY, 14 (2). S60-S67. [Journal article]

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DOI: 10.1088/0963-0252/14/2/S08


Two electrical techniques that are frequently used to characterize radio frequency plasmas are described: current-voltage probes for plasma power input and compensated Langmuir probes for electron energy probability functions and other parameters. The following examples of the use of these techniques, sometimes in conjunction with other diagnostic methods, are presented: plasma source standardization, plasma system comparison, power efficiency, plasma modelling and complex processing plasma mechanisms.

Item Type:Journal article
Faculties and Schools:Faculty of Computing & Engineering
Faculty of Computing & Engineering > School of Engineering
Research Institutes and Groups:Engineering Research Institute
Engineering Research Institute > Nanotechnology & Integrated BioEngineering Centre (NIBEC)
ID Code:7444
Deposited By: Professor Paul Maguire
Deposited On:18 Jan 2010 12:12
Last Modified:17 Oct 2017 15:41

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